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0190-35076
US$25,000.00
DC Power Supply
0020-78506
US$90.00
Catch, Centering Arm
0020-79013
US$280.00
Bracket Lock
0020-77440
US$25.00
Bushing
0021-42306
US$60.00
This part is used in the pad conditioner arm to assist in the Up/Down motion.
0021-53280
US$80.00
This part is installed on the HCLU to assist in wafer Load/Unload.
US$120.00
This part is used as wafer roller in the OnTrak cleaner.