US$120.00
This part is used as wafer roller in the OnTrak cleaner.
0021-53280
HCLU Pedestal Pad
This part is installed on the HCLU to assist in wafer Load/Unload.
US$80.00
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0021-42306
US$60.00
This part is used in the pad conditioner arm to assist in the Up/Down motion.
