US$120.00
This part is used as wafer roller in the OnTrak cleaner.
0021-42306
Pad Conditioner Diaphragm
This part is used in the pad conditioner arm to assist in the Up/Down motion.
US$60.00
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 Wafer Roller&media=https%3A%2F%2Fwww.wf-industrial.com%2F145-large_default%2Fcleaner-module-ontrak-wafer-roller.jpg){kind=link}
0021-53280
US$80.00
This part is installed on the HCLU to assist in wafer Load/Unload.
