0021-42306
US$60.00
This part is used in the pad conditioner arm to assist in the Up/Down motion.
Chemical Mechanical Planarization (CMP)
With over two decades of experience, WF Industrialopolis is a leading provider of CMP (Chemical Mechanical Planarization) polishing tools and consumables to the semiconductor manufacturers. We offer a large inventory of refurbished parts for both new and used machines, perform an overhaul and repair service for all types of CMP tools, and have a large selection of 2nd-sourced CMP consumables.
For more info, do contact us.
Equipment
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AMAT Mirra |
Ebara EPO-222 |
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0021-53280
US$80.00
This part is installed on the HCLU to assist in wafer Load/Unload.
US$120.00
This part is used as wafer roller in the OnTrak cleaner.
0021-26607
US$80.00
This part is in wafer roller assembly in AMAT Mesa Cleaner.
0190-35076
US$25,000.00
DC Power Supply
0020-78506
US$90.00
Catch, Centering Arm
0020-79013
US$280.00
Bracket Lock
0020-77440
US$25.00
Bushing
 Wafer Roller&media=https%3A%2F%2Fwww.wf-industrial.com%2F145-large_default%2Fcleaner-module-ontrak-wafer-roller.jpg){kind=link}
 PU Driver Roller Washer&media=https%3A%2F%2Fwww.wf-industrial.com%2F164-large_default%2Fcleaner-module-mesa-pu-driver-roller-washer.jpg){kind=link}
US$800.00
RORZE RD-023MS 2P Micro Step Driver
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