0021-53280
US$80.00
This part is installed on the HCLU to assist in wafer Load/Unload.
Cleaner Module (Ontrak) Wafer Roller
This part is used as wafer roller in the OnTrak cleaner.
US$120.00
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Related Products
0021-42306
US$60.00
This part is used in the pad conditioner arm to assist in the Up/Down motion.
