US$120.00
This part is used as wafer roller in the OnTrak cleaner.
E17245340
E17245340 ELECTRODE GROUND, GPH, CG
Tool - VARIAN
Tool Model - VISTA HP
Material - Graphite
Tool Type - 300mm
Production Capacity - 100/month
US$98.01
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0021-53280
US$80.00
This part is installed on the HCLU to assist in wafer Load/Unload.
 Wafer Roller&media=https%3A%2F%2Fwww.wf-industrial.com%2F145-large_default%2Fcleaner-module-ontrak-wafer-roller.jpg){kind=link}
0021-42306
US$60.00
This part is used in the pad conditioner arm to assist in the Up/Down motion.
